Project Overview
The Automatic Deposition Tool (ADT) is a sophisticated manufacturing cell featuring a wafer handling robot and multiple specialized stations for performing various processes on semiconductor wafers. This automation system streamlines wafer processing by precisely controlling movement between stations and executing complex recipe sequences with minimal human intervention.
My Role
I developed the complete software control system in LabVIEW that manages all aspects of the ADT’s operation:
- Robotic wafer handling control and positioning
- Process recipe execution and management
- User interface for operators and engineers
- System monitoring and safety protocols
- Data logging and process verification
Technical Challenges Overcome
One of the most significant challenges involved reverse engineering the communication protocol for the spin coater system. With limited documentation from the manufacturer, I developed a method to capture and analyze data packets between the original pendant controller and the spin coater. This analysis allowed me to replicate the necessary commands within our central control software, enabling seamless integration of this critical component.
International Development
The project began in England, where I traveled to continue software development initiated by a previous engineer. During this intensive two-week period, I established the core functionality of the robot control system. To enable continued development after returning to Oregon, I implemented a remote operation capability with webcam monitoring and secure remote desktop access, allowing real-time testing and debugging across continents.
System Evolution
After the system was relocated to Oregon, I collaborated with mechanical engineers to enhance hardware integration, improve documentation, and implement additional features:
- Cooling system controls
- Chemical management systems
- Advanced safety interlocks
- Process monitoring capabilities
The fully integrated system was later installed at a production facility in Washington, where I provided on-site support and additional feature implementation based on process development requirements.
Current Status
The ADT is currently undergoing final validation for production deployment. The system continues to receive occasional software updates and maintenance, but has demonstrated reliable operation and has become an essential component of the manufacturing process.
Key Technologies
- LabVIEW programming
- Robot motion control
- Process automation
- Remote operation capabilities
- Human-machine interface design
- Protocol reverse engineering